A photomask is an image-transferring tool. The photomask is comprised of a solid, transparent substrate, such as glass or fused silica, which has an opaque coating on one surface into which a microscopic pattern has been etched, leaving some regions transparent and others opaque. The opaque regions prevent mask light from passing through, while the transparent regions allow light to pass through.
The photomask is placed in proximity to another substrate, such as a silicon wafer, which has been coated with a photosensitive material called photo resist. The light travels through the photomask, exposing certain regions of the photo resist on the adjoining substrate while the opaque regions protect the photo resist from being exposed.
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We offer the following values:
We offer several variable photomask services:
Standard Photomask, Midrange Photomask options, Enhanced Photomask (tighter tolerances), and 9-inch Masks.
If you have any questions, please call us at 310.634.1717 or contact us for photomask service.
We offer the following photomask
services on all we do:
Standard Photomask Services:
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- F10 Chrome
- F62 Chrome
- F10 Iron Oxide
- F62 Iron Oxide
Line Width
- 3.0 μm
- 2.0 μm
- 4.0 μm
- 3.0 μm
Size
- 4″ – 7″
- 4″ – 7″
- 4″ – 6″
- 4″ – 6″
Substrate
- Soda Lime & Quartz
- Soda Lime & Quartz
- Soda Lime
- Soda Lime
Turn Time
- 3 Days
- 3 Days
- 3 Days
- 3 Days
Standard Photomask Specifications:
Line widths, Vias, Circles and Squares
| SERVICE | Line width | Via | Circle | Square |
| F10 | 3.0 µm | 5.0 µm | 6.0 µm | 6.0 µm |
| F62 | 2.0 µm | 3.0 µm | 4.0 µm | 4.0 µm |
Chrome Photomask Specifications
| CHROME | F10 Standard | F62 Standard | |
| C.D. (smallest line width) | 3.0µm | 2.0µm | |
| C.D. Tolerance (±) | 0.5µm | 0.25µm | |
| C.D. Uniformity | 0.25µm | 0.125µm | |
| Registration (±) | Soda lime | 0.75µm | 0.50µm |
| Registration (±) | Quartz | 0.50µm | 0.35µm |
| Defects | 0>5.0µm | 0>5.0µm | |
Iron Oxide Photomask Specifications
| IRON OXIDE | F10 Standard | F62 Standard | |
| C.D. (smallest line width) | 4.0µm | 3.0µm | |
| C.D. Tolerance (±) | 0.5µm | 0.5µm | |
| C.D. Uniformity | 0.35µm | 0.25µm | |
| Registration (±) | Soda lime | 0.75µm | 0.50µm |
| Registration (±) | Quartz | 0.50µm | 0.35µm |
| Defects | 0>10.0µm | 0>10.0µm | |
Standard Photomask Inspection Process
Standard Service photomasks are visually inspected.
Metrology tools are calibrated with relevant traceable standards.
We place a PCM (Process Control Monitor) on the photomask. The PCM is used to measure and guarantee the features on your mask.
We can measure up to 5 specific features of your choice. Please provide a screen shot or PDF of the features to be measured.
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- Midrange
Line Width
- 1.0 μm
Size
- 4″ – 7″
Substrate
- Soda Lime & Quartz
Turn Time
- 5 Days
Midrange Photomask Specifications:
Soda Lime Midrange Service
| Mask Size | Line width | Tolerance | Registration | Defects |
| 5x5x.090″ | 1.0 µm | .15 µm | .25 µm | 0 > 3 µm |
| 6x6x.120″ | 1.0 µm | .15 µm | .25 µm | 0 > 3 µm |
| 7x7x.120″ | 1.0 µm | 3.0 µm | 4.0 µm | 4.0 µm |
Quartz Midrange Service
| Mask Size | Line width | Tolerance | Registration | Defects |
| 4x4x.090″ | 1.0 µm | .10 µm | .10 µm | 0 > 1 µm |
| 5x5x.090″ | 1.0 µm | .10 µm | .10 µm | 0 > 1 µm |
| 6x6x.120″ | 1.0 µm | .10 µm | .10 µm | 0 > 1 µm |
| 6x6x.250″ | 1.0 µm | .10 µm | .10 µm | 0 > 1 µm |
| 7x7x.150″ | 1.0 µm | .10 µm | .10 µm | 0 > 1 µm |
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Pricing for Enhanced Photomask Services are provided by request.
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- Enhanced
- Enhanced
- Enhanced
Line Width
- 0.8 μm
- 0.7 μm
- 0.6 μm
Substrate
- Quartz
- Quartz
- Quartz
Turn Time
- 5 Days
- 5 Days
- 5 Days
Enhanced Photomask Specifications:
Enhanced Chrome / Quartz 0.7 μm Service
| Mask Size | Line width | Tolerance | Registration | Defects |
| 4x4x.090″ | 0.8 µm | .15 µm .10 µm .05 µm |
.05 µm | 0 > 3 µm 0 > 1 µm 0 > .5 µm |
| 5x5x.090″ | 0.7 µm | .15 µm .10 µm .05 µm |
.05 µm | 0 > 3 µm 0 > 1 µm 0 > .5 µm |
| 6x6x.250″ | 0.7 µm | .15 µm .10 µm .05 µm |
.05 µm | 0 > 3 µm 0 > 1 µm 0 > .5 µm |
| 7x7x.150″ | 0.8 µm | .15 µm .10 µm .05 µm |
.05 µm | 0 > 3 µm 0 > 1 µm 0 > .5 µm |
Enhanced Chrome / Quartz 0.6 μm Service
| Mask Size | Line width | Tolerance | Registration | Defects |
| 5x5x.090″ | 0.6 µm | .15 µm .10 µm .05 µm |
.05 µm | 0 > 3 µm 0 > 1 µm 0 > .5 µm |
| 6x6x.250″ | 0.6 µm | .15 µm .10 µm .05 µm |
.05 µm | 0 > 3 µm 0 > 1 µm 0 > .5 µm |
9-inch Photomask Services:
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- 9-inch
- 9-inch
- 9-inch
Line Width
- 10.0 μm
- 5.0 μm
- 2.5 μm
Size
- 9″
- 9″
- 9″
Substrate
- Soda Lime
- Soda Lime
- Soda Lime
Turn Time
- 5 Days
- 5 Days
- 5 Days
9-inch Chrome / Soda Lime Service
| Mask Size | Line width | Tolerance | Registration | Defects |
| 9x9x.120″ | 10 µm 5 µm 2.5 µm |
2 µm 1.5 µm .25 µm |
2 µm 1 µm .75 µm |
0 > 10 µm 0 > 5 µm 0 > 3 µm |
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The prices and specifications provided by Photo Sciences are for reference only and subject to change without notice.
Photo Sciences, Inc., reserves the right to suspend any or all of its products and/or services at its sole discretion,
with or without notice, and with or without cause.